Title:
DYED POSITIVE TYPE I-LINE PHOTOSENSITIVE MIXTURE
Document Type and Number:
Japanese Patent JP3069581
Kind Code:
B2
Abstract:
PURPOSE: To provide a photosensitive compsn. useful as a dyed positive type photoresist for i-line by incorporating an alkali-soluble resin binder, a photoactive compd. and a specified photosensitive dye into a solvent.
CONSTITUTION: At least one kind of alkali-soluble resin binder, at least one kind of photoactive o-quinonediazido compd. and a photosensitive dye BLANKOPHOR FBW ensuring effective increase of absorption represented by the formula are dissolved in a solvent to obtain the objective i-line sensitive mixture. The amt. of the resin binder is about 60-95wt.% of the total solid content of the mixture, that of the photoactive compd. is about 5-40wt.% and that of the photosensitive dye is about 0.2-4wt.%. The chemical name of the dye is benzenesulfonamido-4-[3-(4chlorophenyl)-4, 5-dihydro-1H-pyrazol-1-yl].
Inventors:
Tryp Nito Hiyura Vuy Jayalarman
David The Ray Buzozovui
David The Ray Buzozovui
Application Number:
JP12874093A
Publication Date:
July 24, 2000
Filing Date:
May 31, 1993
Export Citation:
Assignee:
OLIN MICROELECTRONIC CHEMICALS,INC.
International Classes:
G03F7/004; G03F7/022; G03F7/09; H01L21/027; (IPC1-7): G03F7/004; G03F7/022; H01L21/027
Domestic Patent References:
| JP5735850A | ||||
| JP1154049A | ||||
| JP3233456A | ||||
| JP5179226A |
Attorney, Agent or Firm:
Chika Takagi (2 outside)