Title:
PRODUCTION OF THIN POTASSIUM NIOBATE TANTALATE FILM
Document Type and Number:
Japanese Patent JP3026871
Kind Code:
B2
Abstract:
PURPOSE: To easily produce the dense thin film of potassium niobate tantalate excellent in orientation property and having a desired composition.
CONSTITUTION: A soln. contg. potassium alkoxide, tantalum alkoxide and niobium alkoxide in a specified ratio is refluxed to form a multicomponent alkoxide as the precursor the potassium niobate tantalate expressed by K(TaxNb1-x)O3 (where 0.25≤x<1.00), the reacting liq. is concentrated and applied on the surface of a substrate to form the thin film of the multicomponent alkoxide, and the thin film is heat-treated and then baked.
Inventors:
Shinichi Hirano
Yogo Toshinobu
Koichi Kikuta
Yogo Toshinobu
Koichi Kikuta
Application Number:
JP30757791A
Publication Date:
March 27, 2000
Filing Date:
November 22, 1991
Export Citation:
Assignee:
MURATA MANUFACTURING CO.,LTD.
Shinichi Hirano
Shinichi Hirano
International Classes:
C01G35/00; C23C18/12; H01L41/18; (IPC1-7): C23C18/12; C01G35/00
Domestic Patent References:
| JP55140703A | ||||
| JP4254416A |
Attorney, Agent or Firm:
Aoyama Ryo (1 person outside)