Title:
【発明の名称】化学吸着膜およびその製造方法
Document Type and Number:
Japanese Patent JP3070148
Kind Code:
B2
Inventors:
Tadashi Ohtake
Norio Mino
Kazufumi Ogawa
Norio Mino
Kazufumi Ogawa
Application Number:
JP17670991A
Publication Date:
July 24, 2000
Filing Date:
July 17, 1991
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
B05D1/20; B32B9/00; (IPC1-7): B32B9/00; B05D1/20
Domestic Patent References:
| JP516286A |
Attorney, Agent or Firm:
Fumio Iwahashi (2 others)