【発明の名称】単結晶の無転位収量の改善方法

Japanese Patent JP3054362

B2

A method of reinforcing a crucible for the containment of molten semiconductor material in a Czochralski process, and of inhibiting formation of dislocations within a single crystal grown by the process. The crucible includes a body of vitreous silica having a bottom wall and a sidewall formation extending up from the bottom wall and defining a cavity for holding the molten semiconductor material. The sidewall formation and bottom wall each have an inner and an outer surface. A first devitrification promoter is deposited on the inner surface of the sidewall formation at a temperature below about 600 DEG C. The deposit is such that, when the crucible is heated above 600 DEG C, a first layer of substantially devitrified silica forms on the inner surface which is capable of promoting substantially uniform dissolution of the inner surface and reducing the release of crystalline silica particulates into the molten semiconductor material as a crystal is pulled from the molten semiconductor material. A second devitrification promoter is deposited on the outer surface of the sidewall formation at a temperature below about 600 DEG C. The deposit is such that, when the crucible is heated above 600 DEG C, a second layer of substantially devitrified silica forms on the outer surface which is capable of reinforcing the vitreous silica body.

Richard El Hansen
Robert Di Shelley
Rally e drafall
Robert M McCachchan
John Di Holder
Leon A. Allen

JP15433796A

June 19, 2000

June 14, 1996

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MEMC ELECTRONIC MATERIALS,INCORPORATED
GENERAL ELECTRIC COMPANY

C30B15/10; C30B29/06; C30B35/00; C03B20/00; (IPC1-7): C30B15/10; C03B20/00; C30B29/06

JP63236723A

【文献】国際公開94/24505(WO,A1)

Aoyama Ryo (1 person outside)

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