Title:
【発明の名称】コンタクト孔埋め込み方法
Document Type and Number:
Japanese Patent JP2590594
Kind Code:
B2
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Inventors:
NIIZAWA TSUTOMU
Application Number:
JP19506090A
Publication Date:
March 12, 1997
Filing Date:
July 25, 1990
Export Citation:
Assignee:
NIPPON ELECTRIC CO
International Classes:
H01L21/3205; H01L21/205; H01L21/31; H01L21/768; H01L23/52; (IPC1-7): H01L21/3205; H01L21/205; H01L21/31; H01L21/768
Attorney, Agent or Firm:
Chieko Tateno