Title:
【考案の名称】吸着量測定装置
Document Type and Number:
Japanese Patent JPH067363
Kind Code:
Y2
Inventors:
Hiromitsu Naono
Kazuyuki Nakai
Hideo Sato
Kazuyuki Nakai
Hideo Sato
Application Number:
JP8189387U
Publication Date:
February 23, 1994
Filing Date:
May 28, 1987
Export Citation:
Assignee:
Nippon MKS Co., Ltd.
Hiromitsu Naono
Kazuyuki Nakai
Hiromitsu Naono
Kazuyuki Nakai
International Classes:
G01N7/04; G05D9/00; (IPC1-7): G05D9/00; G01N7/04
Domestic Patent References:
| JP5196356A | ||||
| JP57162004A | ||||
| JP53162924A |
Attorney, Agent or Firm:
Mori Masazumi
Next Patent: 圧力制御弁