DISCHARGE PUMPING EXCIMER LASER EQUIPMENT - MATSUSHITA ELECTRONICS CORP

Title:

DISCHARGE PUMPING EXCIMER LASER EQUIPMENT

Document Type and Number:

Japanese Patent JPH0621544

Kind Code:

A

Abstract:

PURPOSE: To reduce the consumption of preliminary ionization electrodes caused by arc discharge, and stabilize laser output for a long term, in an excimer laser equipment provided with plural pairs of facing preliminary ionization electrodes.

CONSTITUTION: A plurality of pairs of facing preliminary ionization electrodes 49 are installed. An insulator 11 is inserted into the gap of each pair of the preliminary ionization electrodes 49. The shortest part of the surfacial distance of the insulator 11 is made to face the direction of a main discharge part. Thereby directivity can be imparted to the UV rays 13 for preliminary discharge, so that preliminary ionization density is improved and laser output is increased.

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Inventors:

MIKI TADAAKI
SHIMADA YASUHIRO
KOSUGI NAOTAKA
MATSUDA AKIHIRO

Application Number:

JP17805592A

Publication Date:

January 28, 1994

Filing Date:

July 06, 1992

Export Citation:

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Assignee:

MATSUSHITA ELECTRONICS CORP

International Classes:

H01S3/038; H01S3/0977; (IPC1-7): H01S3/0977; H01S3/038

Attorney, Agent or Firm:

Akira Kobiji (2 outside)

Next Patent: GAS LASER EQUIPMENT