Title:
【発明の名称】格子干渉型変位計
Document Type and Number:
Japanese Patent JP2557967
Kind Code:
B2
Inventors:
NISHIOKI NOBUHISA
ITABASHI TATSUO
ITABASHI TATSUO
Application Number:
JP32258788A
Publication Date:
November 27, 1996
Filing Date:
December 21, 1988
Export Citation:
Assignee:
MITUTOYO CORP
International Classes:
G01D5/38; (IPC1-7): G01D5/38
Domestic Patent References:
| JP63309817A | ||||
| JP59163517A | ||||
| JP58191906A | ||||
| JP60190812A |
Attorney, Agent or Firm:
Satoshi Takaya (2 outside)