Title:
【発明の名称】フィルムキャリアの製造方法
Document Type and Number:
Japanese Patent JP2511736
Kind Code:
B2
Inventors:
TAKAHASHI AKIO
FURUKAWA HIDENORI
TOKUNAGA SHIGENORI
FURUKAWA HIDENORI
TOKUNAGA SHIGENORI
Application Number:
JP4613891A
Publication Date:
July 03, 1996
Filing Date:
February 19, 1991
Export Citation:
Assignee:
CHISSO CORP
International Classes:
B23P15/00; H01L21/60; (IPC1-7): H01L21/60; B23P15/00
Domestic Patent References:
| JP6352431A | ||||
| JP6451205A | ||||
| JP2203542A |
Attorney, Agent or Firm:
Katsuhiko Nonaka