Title:
【発明の名称】レ-ザ加工方法
Document Type and Number:
Japanese Patent JP2540501
Kind Code:
B2
Inventors:
YAMAZAKI SHUNPEI
Application Number:
JP21147983A
Publication Date:
October 02, 1996
Filing Date:
November 10, 1983
Export Citation:
Assignee:
HANDOTAI ENERGY KENKYUSHO
International Classes:
B23K26/364; H01L21/302; H01L21/3065; H05K3/00; (IPC1-7): H01L21/302; B23K26/00; H05K3/00
Domestic Patent References:
| JP5712568A | ||||
| JP5753986A | ||||
| JP57176778A | ||||
| JP5788733A | ||||
| JP55140290A |
Attorney, Agent or Firm:
Kamoda Asao