MANUFACTURE OF ORGANIC THIN FILM AND MANUFACTURING DEVICE THEREOF

Title:

MANUFACTURE OF ORGANIC THIN FILM AND MANUFACTURING DEVICE THEREOF

Document Type and Number:

Japanese Patent JPH0653132

Kind Code:

A

Abstract:

PURPOSE: To provide a manufacturing method of a new functional organic thin film and a manufacturing device of the organic thin film for acquiring a uniform and flat good thin film by spin coating.

CONSTITUTION: The title manufacturing method is that of an organic thin film wherein infrared ray is used as heating source in a manufacturing method of an organic thin film wherein a substrate and a film itself under manufacturing are heated when a thin film is manufactured by spin coating of organic compound which is dissolved in high boiling point solvent. The title device is a manufacturing device of an organic thin film which is used for manufacturing of an organic thin film wherein an infrared ray heating device is communicated to a spin coating device. In this method, it is desirable to completely remove solvent molecule by discontinuing heating in the first half of spin coating and by starting it again in the latter half thereof.

Inventors:

KURIHARA TAKASHI
TOMARU AKIRA
OZAWAGUCHI HARUKI

Application Number:

JP22354892A

Publication Date:

February 25, 1994

Filing Date:

July 31, 1992

Export Citation:

Click for automatic bibliography generation Help

Assignee:

NIPPON TELEGRAPH & TELEPHONE

International Classes:

B05C9/14; B05C11/08; B05D1/40; G03C1/74; G03F7/16; H01L21/027; H01L21/31; (IPC1-7): H01L21/027; B05C9/14; B05C11/08; B05D1/40; G03C1/74; G03F7/16; H01L21/31

Attorney, Agent or Firm:

Hiroshi Nakamoto (2 outside)

Next Patent: ROTARY PADDLE TREATMENT DEVICE