Title:
【発明の名称】フォトマスクの製造方法
Document Type and Number:
Japanese Patent JP2593234
Kind Code:
B2
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Inventors:
Fujino Tsuyoshi
Application Number:
JP12899990A
Publication Date:
March 26, 1997
Filing Date:
May 21, 1990
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
G03F1/30; G03F1/68; G03F1/80; G03F1/84; H01L21/027; H01L21/30; (IPC1-7): G03F1/08; H01L21/027
Attorney, Agent or Firm:
Mitsuteru Soga (5 people outside)