Title:
APPARATUS FOR OBSERVING OPTICAL-DISK ORIGINAL PLATE
Document Type and Number:
Japanese Patent JP2550863
Kind Code:
B2
Abstract:
PURPOSE: To observe the exposure state of an optical-disk original plate, whose exposure has been finished, before a photoresist is developed.
CONSTITUTION: An optical-disk original plate 3 whose exposure has been finished is irradiated with light at the power or the wavelength of which a photoresist is not exposed as irradiation light from a laser source 1. The quantity of light at which the irradiation light is transmitted through the optical-disk original plate 3 is detected by a CCD camera 6. On the basis of the output of the CCD camera 6, the state of a bit pattern exposed on the optical-disk original plate 3 is observed as the distribution of a difference in the quantity of transmitted light.
Inventors:
ISHIZUKA KENICHI
Application Number:
JP15231593A
Publication Date:
November 06, 1996
Filing Date:
June 23, 1993
Export Citation:
Assignee:
NIPPON ELECTRIC CO
International Classes:
G01B11/30; G03F7/20; G11B7/26; (IPC1-7): G01B11/30; G03F7/20; G11B7/26
Domestic Patent References:
| JP1136002A | ||||
| JP3280232A |
Attorney, Agent or Firm:
Yosuke Goto (2 outside)
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