Title:
PULLING UP OF SINGLE CRYSTAL AND APPARATUS THEREFOR
Document Type and Number:
Japanese Patent JP2601411
Kind Code:
B2
Abstract:
PURPOSE: To obtain a single crystal non-contaminated or slightly contaminated with oxygen in a supporting base pulling up method by forming a molten pool to be held on the supporting body by the surface tension of a melt and the electromagnetic force of an induction coil and recharging a semiconductor material to the melt in the form of solid or liquid during the growth of the single crystal.
CONSTITUTION: A seed crystal 2 is grown to the single crystal 3 pulled up in a direction perpendicular to the semiconductor melt 5 which forms a molten pool via a pulling up device 4. The induction coil 6 is arranged at a narrow spacing to the melt surface and annularly encloses the single crystal. An annular shaped body 7 is so held as to be immersed into the molten pool by utilizing a holder 7a. The fine granular semiconductor material 10 is transported from a raw material vessel 11 through a supply pipe 9 into the shaped body 7 by utilizing a quantity distributor 12 by the aperture 8 in the induction coil 6 and is simultaneously transported into the melt. The raw material vessel 11 is capable of releasing the solid semiconductor material of the same quantity as the quantity permitted by the quantity distributor 12.
Inventors:
Erich Tomjik
Reinhard Wolf
Wolfgang Hansel
Reinhard Wolf
Wolfgang Hansel
Application Number:
JP13968294A
Publication Date:
April 16, 1997
Filing Date:
May 31, 1994
Export Citation:
Assignee:
Wacker Ziltronique Gezelshaft Fuer Halbreiter Materia Lien Akchen Gezelshaft
International Classes:
C30B15/00; C30B15/02; H01L21/208; (IPC1-7): C30B15/00; H01L21/208
Domestic Patent References:
| JP2212396A | ||||
| JP4723301A | ||||
| JP61174190A | ||||
| JP59141578U |
Attorney, Agent or Firm:
Tadashi Hagino (3 outside)