To provide a technology for manufacturing a nanohole array, the pore period, pore diameter and film thickness of which are controlled with high accuracy.
According to this manufacturing method of a nanohole array, a pore of an anodized porous alumina film is filled with a first material, and further the periphery of the porous alumina film is also covered with the first material. After that, the alumina is removed to manufacture a pillar array structure having upper and lower support layers. A void between pillars of the pillar array structure having the upper and lower support layers is filled with a second material. After that, the pillar array structure is removed to manufacture a nanohole array. This invention further provides a composite material and a manufacturing method thereof using the above nanohole array.
YAGISHITA TAKASHI
MATSUMOTO FUTOSHI
NISHIO KAZUYUKI
| JPH0632675A | 1994-02-08 | |||
| JPH10284766A | 1998-10-23 | |||
| JP2002277659A | 2002-09-25 | |||
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| JPS5859008A | 1983-04-07 | |||
| JPH07156210A | 1995-06-20 | |||
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