ナノインプリント方法及びナノインプリント装置 - Nippon Telegraph and Telephone Corporation

Title:

ナノインプリント方法及びナノインプリント装置

Document Type and Number:

Japanese Patent JP4884730

Kind Code:

B2

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Inventors:

Yokoo Atsushi
Hideo Ikutsu

Application Number:

JP2005258483A

Publication Date:

February 29, 2012

Filing Date:

September 06, 2005

Export Citation:

Assignee:

Nippon Telegraph and Telephone Corporation

International Classes:

B82B3/00; B29C59/02; B81C99/00; B82Y40/00; H01L21/027; H01L21/316

Domestic Patent References:

Other References:

A. Yokoo,Nanoelectrode lithography and multiple patterning,Journal of Vacuum Science & Technology B,2003年,Volume 21, Issue 6 ,pp.2966-2969

Attorney, Agent or Firm:

Tadahiko Ito
Ryuji Ishihara

Previous Patent: JPS4884729

Next Patent: 乗客コンベア装置