Title:
処理チャンバのためのナノ粒子測定
Document Type and Number:
Japanese Patent JP7228600
Kind Code:
B2
Abstract:
In an embodiment, a method of measuring nanoparticles from a sample using single particle inductively coupled plasma mass spectrometry (spICPMS) includes separating the nanoparticles from a surface of the sample by: exposing the surface to a first exposure surface of a first liquid medium; and mechanically manipulating the first liquid medium; and measuring the first liquid medium using spICPMS. In an embodiment, a method of detecting nanoparticle contamination in a processing chamber includes removing a first component from the processing chamber subsequent to a processing operation; and measuring first nanoparticles from the first component using spICPMS, comprising: separating the first nanoparticles from a first surface of the first component by: exposing a first portion of the first surface to a first exposure surface of a first liquid medium; and mechanically manipulating the first liquid medium.
More Like This:
| JP4800048 | How to measure isotope content |
| JP2007194097 | CHARGED PARTICLE TRANSPORT MECHANISM |
| JP3693512 | MANUFACTURE OF IGNITION PLUG OR FLAME DETECTOR |
Inventors:
Wang, Chien Xiong
Application Number:
JP2020561055A
Publication Date:
February 24, 2023
Filing Date:
February 22, 2019
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
G01N27/62; B82Y35/00; G01N15/10; H01J49/10; H01J49/26
Domestic Patent References:
| JP2001077158A | ||||
| JP2012032270A | ||||
| JP2008506530A | ||||
| JP2009076747A | ||||
| JP2008078642A | ||||
| JP2002289660A | ||||
| JP2004347543A | ||||
| JP2016044988A | ||||
| JP2009038224A | ||||
| JP2008004603A | ||||
| JP2007511882A | ||||
| JP2011095016A | ||||
| JP2003017538A | ||||
| JP2004069502A | ||||
| JP2014514743A | ||||
| JP2008132401A | ||||
| JP11344428A | ||||
| JP2006013234A |
Foreign References:
| WO2017170428A1 | ||||
| US20110036874 | ||||
| WO2016144107A1 |
Other References:
Mey-Ami, L. M. et al.,Single Nanoparticle ICP-MS Analysis of Process Chemicals and UPW Used in Surface Cleaning and Preparation,SPCC Conference,Poster session,2018年04月11日,pp. 1-16,https://www.linx-consulting.com/wp-content/uploads/2018/04/03-09-L_Mey-Ami-Air_Liquide-Single_Nano_PC-ICP-MS-Analysis.pdf
Wilbur, S. et al.,Characterization of nanoparticles in aqueous samples by ICP-MS,White paper, Agilent Technologies,2017年07月31日,Publication number: 5991-5516EN,pp. 1-10,https://www.agilent.com/us/library/whitepaper/public/ICP-MS_5591-5516EN-nanoparticles.pdf
Wilbur, S. et al.,Characterization of nanoparticles in aqueous samples by ICP-MS,White paper, Agilent Technologies,2017年07月31日,Publication number: 5991-5516EN,pp. 1-10,https://www.agilent.com/us/library/whitepaper/public/ICP-MS_5591-5516EN-nanoparticles.pdf
Attorney, Agent or Firm:
Sonoda & Kobayashi Patent Attorneys Corporation