Title:
ナノ構造体、電子デバイス、及びその製造方法
Document Type and Number:
Japanese Patent JP4428921
Kind Code:
B2
Abstract:
Cylinders having Al as a major constituent are orderly arrayed in an (Si, Ge) matrix. In a nanostructure in the form of a mixture film having a plurality of cylinders having Al as a major constituent, and a matrix region surrounding the plurality of cylinders and having Si and/or Ge as a major constituent, the total amount of Si and Ge is in the range from 20 to 70 atomic % in the mixture film, the cylinders are orderly arrayed, the diameter of the cylinders is in the range from 1 to 30 nm, and the interval between the cylinders is 30 nm or less.
Inventors:
Toru Tada
Kazuhiko Fukutani
Kazuhiko Fukutani
Application Number:
JP2002363128A
Publication Date:
March 10, 2010
Filing Date:
December 13, 2002
Export Citation:
Assignee:
Canon Inc
International Classes:
H01L29/06; B82B1/00; B82B3/00; C30B29/60; H01L21/8247; H01L27/115; H01L29/423; H01L29/788; H01L29/792; H01L39/22; H01L39/24; H01L51/30
Domestic Patent References:
| JP2002332578A | ||||
| JP2002346999A | ||||
| JP2001207288A | ||||
| JP20019800A | ||||
| JP2000315785A |
Foreign References:
| WO2001071394A1 |
Attorney, Agent or Firm:
Keizo Nishiyama
Yuichi Uchio
Yuichi Uchio