Title:
NEAR DISTANCE CONTROL DEVICE AND NEAR DISTANCE CONTROL METHOD
Document Type and Number:
Japanese Patent JP2001358049
Kind Code:
A
Abstract:
To provide a near distance control device which can accurately control between a substrate to be heat-treated and a temperature adjusting member arranged thereabove in a high-temperature environment and without affecting the uniformity of the surface temperature.
A hole 47 is formed on the plane normal line of an area to be measured on a substrate W heat-treated in a temperature adjusting member 43, and an air pressure sensor 61 is provided so that a signal is outputted corresponding to the change of air pressure in a narrow clearance between the substrate W and member 43 through the hole 47, thus controlling between the substrate W and member 43 according to the outputted signal from the sensor 61.
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Inventors:
USUI YOICHI
SATO YASUYUKI
SAINO KOSAKU
SATO YASUYUKI
SAINO KOSAKU
Application Number:
JP2000176490A
Publication Date:
December 26, 2001
Filing Date:
June 13, 2000
Export Citation:
Assignee:
FUJITSU LTD
TATSUMO KK
TATSUMO KK
International Classes:
G01L23/04; B05C9/14; F26B23/04; H01L21/027; H01L21/31; (IPC1-7): H01L21/027; B05C9/14; F26B23/04; H01L21/31
Attorney, Agent or Firm:
Hironobu Onda (1 person outside)