To provide a technique capable of carrying out repair and regeneration in a vacuum chamber without extracting and changing defective parts when the abrasion or breakage of a probe of a probe microscope, the flection or breakage of a micro-manipulator, or the abrasion or breakage of micro-tweezers occur.

When abrasion or fracture of a needle part 4 of a manipulator provided in an FIB device is confirmed in a microscope image, a lost structure of the needle part is repaired by CVD using an FIB, or when it is confirmed in a microscope image that the needle part 4 of the manipulator provided in the FIB device is in a bent state, the part is cut by etching using an FIB to form a normal structure at a tip of the cut part with the CVD using an FIB to repair the needle part. The application is also applied to tweezers having two needles held as a pair to be used.