Title:
負イオン生成装置
Document Type and Number:
Japanese Patent JP7185487
Kind Code:
B2
Abstract:
To provide a negative ion generation device capable of radiating negative ion to an object at a proper timing.SOLUTION: A control part 50 controls impression of a voltage by a voltage impression part 90 based on a measurement result by a potential measurement part 110, after stopping generation of plasma P from a plasma gun 7. Hereby, the control part 50 can radiate negative ion to a deposition object 11 at a timing capable of avoiding radiation of a large amount of electrons to the object.SELECTED DRAWING: Figure 2
Inventors:
Naohisa Kitami
Application Number:
JP2018202661A
Publication Date:
December 07, 2022
Filing Date:
October 29, 2018
Export Citation:
Assignee:
Sumitomo Heavy Industries Ltd.
International Classes:
C23C14/32; C23C14/54; C23C14/58; H01J27/02; H01J37/08; H05H1/48
Domestic Patent References:
| JP2017025407A | ||||
| JP10079372A | ||||
| JP7326489A |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Yasuki Yanagi
Yoshiki Kuroki
Yasuki Yanagi