Title:
ネガ型パターン形成方法及びフォトレジスト組成物
Document Type and Number:
Japanese Patent JPWO2012114963
Kind Code:
A
Inventors:
Taiichi Furukawa
Ito 亘史
Miyata 拡
Hirokazu Sakakibara
Ito 亘史
Miyata 拡
Hirokazu Sakakibara
Application Number:
JP2012053570W
Publication Date:
July 07, 2014
Filing Date:
February 15, 2012
Export Citation:
Assignee:
JSR, Inc.
International Classes:
H01L21/027; G03F7/038; G03F7/039; G03F7/004
Attorney, Agent or Firm:
Kazuki Amano