Title:
ネガ型感光性樹脂組成物及びパターン形成方法
Document Type and Number:
Japanese Patent JP4618075
Kind Code:
B2
Inventors:
Minegishi Tomonori
Application Number:
JP2005276496A
Publication Date:
January 26, 2011
Filing Date:
September 22, 2005
Export Citation:
Assignee:
Hitachi Chemical DuPont Micro Systems Co., Ltd.
International Classes:
G03F7/038; G03F7/004; H01L21/027
Domestic Patent References:
| JP2002249646A | ||||
| JP11153866A | ||||
| JP2001125267A | ||||
| JP2002169286A | ||||
| JP2001033964A | ||||
| JP2003121998A |
Attorney, Agent or Firm:
Hiroaki Sakai