Title:
ネガ型レジスト組成物
Document Type and Number:
Japanese Patent JP4139655
Kind Code:
B2
Inventors:
Yutaka Adegawa
Application Number:
JP2002262775A
Publication Date:
August 27, 2008
Filing Date:
September 09, 2002
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
G03F7/038; C08F297/02; G03F7/033; H01L21/027
Domestic Patent References:
| JP11149160A | ||||
| JP2002229209A | ||||
| JP2002139836A | ||||
| JP2001114825A |
Attorney, Agent or Firm:
Takeshi Takamatsu
Kiyozumi Yazawa
Kiyozumi Yazawa