PURPOSE: To prevent accumulation of electrostatic charge and to enable a micropattern to be formed without any slip of its position by partially converting polyvinylbenzyl chloride into quaternary ammonium, reacting it with lithium.tetracyanoquinodimethane (TCNQ) salt to partially form a salt type complex, and using the electrically conductive negative type resist composition thus obtained.
CONSTITUTION: Polyvinylbenzyl chloride having a molecular weight of about 40,000, and a dispersion degree of 1.5 is dissolved in 1,4-dioxane, triethylamine is added, stirred with heating until the cloudy solution becomes transparent, and 60% of the chloromethyl groups of the polymer is converted into trimethylammonium groups. The ethanol solution of this polymer and a solution of lithiumWTCNQ are mixed and stirred in a nirogen gas stream at room temperature to convert all the cation groups into the TCNQ salt complex. A silicon substrate is coated by the spin coating method with a cyclohexanone solution of this negative type resist material thus prepared, and then it is baked.
YONEDA YASUHIRO
SAITO KAZUMASA
MIYAGAWA MASASHI
