Title:
NEUTRAL PARTICLE BEAM TREATMENT APPARATUS
Document Type and Number:
Japanese Patent JP3912993
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a charge-free and damage-free neutral particle beam treatment apparatus capable of irradiating an article to be treated with a large- diameter beam with a cheap and compact construction and moreover of achieving a high neutralization rate.
SOLUTION: The neutral particle beam treatment apparatus comprises a holding part 20 for holding an article X to be treated, a plasma forming part for forming plasma within a vacuum chamber 3, an orifice electrode 5 arranged between the article X to be treated and the plasma forming part, a grid electrode 4, and an a.c. power source 100 for drawing out positive ions from the plasma formed by applying voltage between the orifice electrode 5 and the grid electrode 4 to pass them through orifices 5a formed in the orifice electrode 5.
Inventors:
Katsunori Ichiki
Kazuo Yamauchi
Hirokuni Hiyama
Samukawa Seiji
Kazuo Yamauchi
Hirokuni Hiyama
Samukawa Seiji
Application Number:
JP2001088866A
Publication Date:
May 09, 2007
Filing Date:
March 26, 2001
Export Citation:
Assignee:
Ebara Corporation
International Classes:
H05H3/00; C23C14/32; G21K1/14; H01J37/317; H01J37/32; H01L21/302; H01L21/3065; H01L21/31; H05H1/46; H05H3/02; (IPC1-7): H05H3/00; C23C14/32; G21K1/14; H01L21/3065; H01L21/31; H05H1/46
Domestic Patent References:
| JP5121194A | ||||
| JP982689A | ||||
| JP10106798A |
Attorney, Agent or Firm:
Isamu Watanabe
Shintaro Hotta
Ryoji Kosugi
Tomohiro Mori
Shintaro Hotta
Ryoji Kosugi
Tomohiro Mori
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