Title:
新規な誘電体酸化物膜およびその製造方法
Document Type and Number:
Japanese Patent JP2012521947
Kind Code:
A
Abstract:
Dielectric oxide materials prepared by producing a sol from a mixture of a metal oxide precursor, a solvent, and an epoxide, and preparing a metal oxide material from the sol. In various versions, the mixture can also include a cosolvent, one or more additional metal oxide precursors, water, or a precursor to a glassforming oxide, or any combination thereof. The prepared dielectric oxide materials can be in the form of thin films having high κ values, low electrical leakage, and low dielectric loss tangent values.
Inventors:
PHILLIPS, Mark
Thomas, Travis
Ferguson, sole
Thomas, Travis
Ferguson, sole
Application Number:
JP2012502181A
Publication Date:
September 20, 2012
Filing Date:
March 23, 2010
Export Citation:
Assignee:
SBA Materials Inc.
International Classes:
C01B13/36; C01B33/12; C01G23/00; C01G23/04; C01G25/00; C01G29/00; C01G35/00; H01B3/00; H01L21/316
Domestic Patent References:
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| JP2009149706A | 2009-07-09 | |||
| JP2005078948A | 2005-03-24 | |||
| JP2005078948A | 2005-03-24 |
Foreign References:
| US0008022A | 1851-04-08 | |||
| US0003022A | 1843-03-30 | |||
| US0008020A | 1851-04-01 | |||
| US6986818B2 | 2006-01-17 | |||
| US6986818B2 | 2006-01-17 | |||
| US6355821B1 | 2002-03-12 |
Attorney, Agent or Firm:
Atsushi Nakajima
Kato Kazunori
Katsuichi Nishimoto
Kato Kazunori
Katsuichi Nishimoto