Title:
新規な(メタ)アクリル酸エステル誘導体、ハロエステル誘導体および高分子化合物
Document Type and Number:
Japanese Patent JP5270187
Kind Code:
B2
Abstract:
Provided are a polymerizable compound shown below which is useful as a raw material for a polymer having less swelling in developing, a polymer obtained by polymerizing a raw material containing the above polymerizable compound, a photoresist composition which contains the above polymer and which is improved in LWR and an efficient production process for the polymerizable compound described above: wherein n represents an integer of 0 to 2; R1 represents a hydrogen atom, methyl or trifluoromethyl; R2, R3, R4, R5, R6, R7, R8, R9 and R10 represent a hydrogen atom, an alkyl group having 1 to 6 carbon atoms or the like; W represents an alkylene group having 1 to 10 carbon atoms or the like; and Y1 and Y2 represent an oxygen atom or a sulfur atom.
Inventors:
Junko Sato
Osamu Nakayama
Takashi Fukumoto
Osamu Nakayama
Takashi Fukumoto
Application Number:
JP2008041008A
Publication Date:
August 21, 2013
Filing Date:
February 22, 2008
Export Citation:
Assignee:
KURARAY CO.,LTD.
International Classes:
C07D327/06; C07D339/08; C08F20/38
Domestic Patent References:
| JP2002030082A | ||||
| JP2001302619A | ||||
| JP2001048877A | ||||
| JP2000509075A | ||||
| JP4321662A |