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Title:
NEW (METH)ACRYLATE COMPOUND HAVING LACTONE STRUCTURE, POLYMER, PHOTORESIST MATERIAL, AND METHOD OF PATTERN FORMATION
Document Type and Number:
Japanese Patent JP2002371114
Kind Code:
A
Abstract:

To provide a polymer having high transparency, especially at excimer laser exposure wavelength.

The (meth)acrylate compound giving the polymer is shown by the general formula (1) (where, R1 is H or CH3, R2 and R3 are each H or an alkyl; X is a group forming a norbornane ring, bicyclo [2. 2. 2] octane ring, 7-oxanorbornane ring or cycohexane ring; and the dotted line indicates binding the structure and the γ-butylolactone ring structure to each other).


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Inventors:
KANOU TAKESHI
HASEGAWA KOJI
WATANABE TAKESHI
Application Number:
JP2001179614A
Publication Date:
December 26, 2002
Filing Date:
June 14, 2001
Export Citation:
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Assignee:
SHINETSU CHEMICAL CO
International Classes:
C07D307/33; C07D307/77; C07D307/94; C07D493/08; C07D493/20; C08F20/28; G03F7/039; G03F7/032; H01L21/027; (IPC1-7): C08F20/28; C07D307/33; C07D307/77; C07D307/94; G03F7/039; H01L21/027
Attorney, Agent or Firm:
Takashi Kojima (1 person outside)



 
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