Title:
SCANNING PROBE MICROSCOPE
Document Type and Number:
Japanese Patent JP3236500
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To obtain a scanning probe microscope which is provided with a resolution capable of searching a visual field in a low-magnification region and which can be miniaturized.
SOLUTION: A cap 25 is installed so as to surround a head 24 which houses a sample 3. An electron-beam irradiation system 33 which is composed of an electron gun 30, of a converging lens 31 and of a deflector 32 is installed in a position which faces the sample 3 at the cap 25, and an electricity-to-light conversion means 44 which is composed of an insulating substrate 34, of a phosphor 35 and of an anode electrode 36 is installed at the front of the light- receiving face of a detector 6. Then, when the sample 3 is irradiated with an electron beam from the electron-beam irradiation system 33, secondary electrons are radiated from the secondary electrons collide with the electricity-to-light conversion means 44. As a result, the electricity-to-light conversion means 44 emits light, and the light is detected by the detector 6. Thereby, a visual field can be searched in a low-magnification region.
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Inventors:
Takashi Sueyoshi
Application Number:
JP6277996A
Publication Date:
December 10, 2001
Filing Date:
March 19, 1996
Export Citation:
Assignee:
JEOL Ltd.
International Classes:
G01B21/30; G01N37/00; G01Q30/02; G01Q30/16; G01Q60/24; G01Q90/00; (IPC1-7): G01N13/10; G01N13/16
Domestic Patent References:
| JP579833A | ||||
| JP4324303A | ||||
| JP6117848A | ||||
| JP6223766A | ||||
| JP6129847A | ||||
| JP3102754A |
Attorney, Agent or Firm:
Kenji Aoki (7 outside)