To obtain the subject new compound useful as a chemically amplifying type resist.
This resist is a compound of formula I or formula II (R1 and R2 are each an aromatic organic group, an alkyl, a cycloalkyl or the like; R8-R10 are each an aromatic organic group, an alkyl, an aralkyl or the like; R3-R7 are each H, a halogen, nitro, a lower alkoxyl or the like; a total carbon number of R3-R7 is 4-7), e.g. 4-t-butylbenzene sulfonate di(4-t-butylphenyl) iodonium-4-t-butylbenzene sulfonate. The compound of formula I or formula II is obtained by reacting a corresponding specific sulfonic acid or its salt in an aqueous solution of an onium salt synthesized by a known method or in a solution of an organic solvent such as methanol, acetone or acetonitrile and exchanging the salt. The compound of formula I or formula II has a property generating an acid by being exposed with various radioactive rays such as ultraviolet rays or X-rays, excellent in solubility in a solvent and excellent in solubility with various resins.
ISHII SHINJI
DONALD W JOHNSON
MICRO CHEM CORP