Title:
新規オニウム塩、レジスト材料及びパターン形成方法
Document Type and Number:
Japanese Patent JP4462397
Kind Code:
B2
Inventors:
Yoichi Osawa
Jun Watanabe
Wataru Kusagi
Satoshi Watanabe
Takeshi Nagata
Shigehiro Nakura
Jun Watanabe
Wataru Kusagi
Satoshi Watanabe
Takeshi Nagata
Shigehiro Nakura
Application Number:
JP2000245564A
Publication Date:
May 12, 2010
Filing Date:
August 14, 2000
Export Citation:
Assignee:
Shin-Etsu Chemical Co., Ltd.
International Classes:
C07C381/12; G03F7/004; C07C309/72; C08F12/24; C08K5/42; C08L25/16; C08L101/00; G03F7/039; H01L21/027
Domestic Patent References:
| JP11327149A |
Attorney, Agent or Firm:
Takashi Kojima
Yuko Nishikawa
Yoshihiro Nagare
Yuko Nishikawa
Yoshihiro Nagare