Title:
新規スルホン酸塩及びその誘導体、光酸発生剤並びにこれを用いたレジスト材料及びパターン形成方法
Document Type and Number:
Japanese Patent JP4905667
Kind Code:
B2
Inventors:
Katsuhiro Kobayashi
Yoichi Osawa
Tsuyoshi Kanao
Takeshi Watanabe
Masaki Ohashi
Yoichi Osawa
Tsuyoshi Kanao
Takeshi Watanabe
Masaki Ohashi
Application Number:
JP2006244262A
Publication Date:
March 28, 2012
Filing Date:
September 08, 2006
Export Citation:
Assignee:
Shin-Etsu Chemical Co., Ltd.
International Classes:
C07C309/08; C07C25/00; C07C381/12; C07D207/48; G03F7/004; G03F7/039; G03F7/075; H01L21/027
Domestic Patent References:
| JP2004531749A |
Attorney, Agent or Firm:
Takashi Kojima
Saori Shigematsu
Katsunari Kobayashi
Takeshi Ishikawa
Saori Shigematsu
Katsunari Kobayashi
Takeshi Ishikawa