Title:
新規スルホン酸塩及びその誘導体、光酸発生剤並びにこれを用いたレジスト材料及びパターン形成方法
Document Type and Number:
Japanese Patent JP5347433
Kind Code:
B2
Inventors:
Kazuhiko Maeda
Yoshimi Isono
Satoshi Naritsuka
Yoshimi Isono
Satoshi Naritsuka
Application Number:
JP2008283256A
Publication Date:
November 20, 2013
Filing Date:
November 04, 2008
Export Citation:
Assignee:
Central Glass Co., Ltd.
International Classes:
C07C309/12; C07C381/12; C07D207/404; C07D207/444; C07D209/48; C07D209/52; C07D491/18; G03F7/004; G03F7/039
Domestic Patent References:
| JP2002214774A | ||||
| JP2007145797A |
Foreign References:
| WO2008099869A1 |
Attorney, Agent or Firm:
Makoto Koide