Title:
ニオブスパッタ要素、ニオブ金属およびそれを含む物品
Document Type and Number:
Japanese Patent JP5341292
Kind Code:
B2
Abstract:
High purity niobium metals and alloys containing the same are described. The niobium metal preferably has a purity of at least 99.99% and more preferably at least 99.999%. In addition, niobium metal and alloys thereof are described, which either have a grain size of about 150 microns or less, or a texture in which a (100) intensity within any 5% increment of thickness is less than about 30 random, or an incremental log ratio of (111):(100) intensity of greater than about -4.0, or any combination of these properties. Also described are articles and components made from the niobium metal which include, but are not limited to, sputtering targets, capacitor cans, resistive film layers, wire, and the like. Also disclosed is a process for making the high purity niobium metal which includes the step of reacting a salt-containing niobium and a metal salt along with at least one compound capable of reducing the salt-containing niobium to niobium and in a reaction container. The reaction container or liner in the reaction container and the agitator or liner on the agitator are made from a metal material having the same or higher vapor pressure of melted niobium. The high purity niobium product preferably has a fine and uniform microstructure.
Inventors:
Mikarac, Christopher A.
Huber, Louis Y. Jr.
Huber, Louis Y. Jr.
Application Number:
JP2002510732A
Publication Date:
November 13, 2013
Filing Date:
May 21, 2001
Export Citation:
Assignee:
CABOT CORPORATION
International Classes:
B22D21/02; C22C27/02; B22D7/00; B22D21/06; B22D27/02; C22B5/04; C22B34/24; C23C14/34; H01L21/28; H01L21/285
Domestic Patent References:
| JP2000104164A |
Attorney, Agent or Firm:
Atsushi Aoki
Takashi Ishida
Tetsuji Koga
Atsushi Ebiya
Yoshihiro Kobayashi
Goji Tasaki
Takashi Ishida
Tetsuji Koga
Atsushi Ebiya
Yoshihiro Kobayashi
Goji Tasaki