Title:
窒化物材料およびそれからなる圧電体並びにその圧電体を用いたＭＥＭＳデバイス
Document Type and Number:
Japanese Patent JP7398803
Kind Code:
B2
Abstract:
To provide a nitride material having at least one value of high figures of merit (piezoelectric constants (d33), piezoelectric stress constants (e33), elastic constants (C33), piezoelectric output constants (g33) and electromechanical coupling constants (k2), and a piezoelectric material comprising the same, and an MEMS device comprising the piezoelectric material.SOLUTION: The present disclosure provides a nitride material represented by chemical formula Al1-XYbXN, where the value of X is 0.60 or more and 1.00 or less.SELECTED DRAWING: Figure 5
Inventors:
Kenji Hirata
Masato Uehara
Hiroshi Yamada
Angaraini pickpocket sweetfish
Morito Akiyama
Masato Uehara
Hiroshi Yamada
Angaraini pickpocket sweetfish
Morito Akiyama
Application Number:
JP2020168463A
Publication Date:
December 15, 2023
Filing Date:
October 05, 2020
Export Citation:
Assignee:
National Institute of Advanced Industrial Science and Technology
International Classes:
C04B35/50; B81B7/02; H03H9/24
Domestic Patent References:
| JP2009010926A | ||||
| JP2017511294A | ||||
| JP2017201050A |
Foreign References:
| US20170263847 |
Attorney, Agent or Firm:
Takayuki Takamatsu
Noriko Suzuki
Noriko Suzuki