Title:
非接触搬送装置
Document Type and Number:
Japanese Patent JP5536516
Kind Code:
B2
Inventors:
Hideo Ozawa
Kouichi Kakuda
Takahiro Yasuda
Kouichi Kakuda
Takahiro Yasuda
Application Number:
JP2010092724A
Publication Date:
July 02, 2014
Filing Date:
April 14, 2010
Export Citation:
Assignee:
OILES CORPORATION
International Classes:
B65G49/06; B65G51/03; H01L21/677
Domestic Patent References:
| JP2005263336A | ||||
| JP2005247516A | ||||
| JP2008505041A |
Foreign References:
| WO2009119377A1 | ||||
| WO2010004800A1 | ||||
| WO2011129152A1 |
Attorney, Agent or Firm:
Jun Nakai