Title:
NONCONTACT SHAPE MEASURING APPARATUS
Document Type and Number:
Japanese Patent JP2598862
Kind Code:
B2
Abstract:
PURPOSE: To provide a noncontact shape measuring apparatus which can prevent measurement error caused by the fine flaw of a measured object, a pinhole, surface roughness, a scraped flaw, the roughness of ground surface, dust and the like.
CONSTITUTION: Air pads 34 are severally arranged at positions where a fixed space is taken away from a touch signal probe 30 with a compression coil spring 32 set between them, and in a measuring process, as a noncontact state where an air film is formed between the air pad 34 and the surface of a surface plate 44 being a measured body is kept, the touch signal probe 30 is moved to an abutting position where the touch signal probe 30 abuts against the air pad 34 with the compression coil spring 32 being contracted, and the measurement is carried out by taking in a contact signal fed out from the touch signal probe 30.
Inventors:
Oscar Hayama
Kawahori Masao
Kawahori Masao
Application Number:
JP31197892A
Publication Date:
April 09, 1997
Filing Date:
November 20, 1992
Export Citation:
Assignee:
Mitutoyo Corporation
International Classes:
G01B13/22; (IPC1-7): G01B13/22
Domestic Patent References:
| JP5322350Y2 |
Attorney, Agent or Firm:
Minoru Kinoshita (2 outside)