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Title:
NOVEL MONOMER, POLYMER, SYNTHETIC METHODS THEREFOR AND PHOTORESIST COMPOSITION
Document Type and Number:
Japanese Patent JP2002003447
Kind Code:
A
Abstract:

To provide a novel alicyclic esterified norbornene carboxylate monomer, polymer thereof and photoresist composition including the polymer as a resin binder and the synthetic methods for the same.

The method of preparing a substituted norbornene represented by general formula (II) (X is a tertiary alicyclic group) comprises (a) the formation of an α,β-unsaturated ester by reaction of an alicyclic alcohol with an α,β-unsaturated compound and (b) the formation of a norbornene by reaction of an α,β-unsaturated ester with a diene. In the process, the step (a) and the step (b) are carried out in succession without isolation of the α,β-unsaturated ester before the reaction with the diene. In an embodiment, the monomer of formula 7 is prepared through the reaction scheme (11).


Inventors:
BARCLAY GEORGE G
YUEH WANG
MATTIA JOSEPH
Application Number:
JP2001050311A
Publication Date:
January 09, 2002
Filing Date:
February 26, 2001
Export Citation:
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Assignee:
SHIPLEY CO LLC
International Classes:
C07C13/42; C07C29/40; C07C35/06; C07C35/08; C07C35/24; C07C35/27; C07C35/30; C07C35/37; C07C67/14; C07C67/347; C07C69/00; C07C69/013; C07C69/54; C07C69/753; C08F32/04; G03F7/039; G03F7/027; H01L21/027; G03F7/004; (IPC1-7): C07C67/347; C07C35/06; C07C35/08; C07C35/24; C07C35/27; C07C35/30; C07C35/37; C07C69/013; C07C69/753; C08F32/04; G03F7/027; G03F7/039; H01L21/027
Attorney, Agent or Firm:
Minoru Senda (2 outside)