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Title:
NOZZLE FOR LASER BEAM MACHINING, AND LASER BEAM MACHINE
Document Type and Number:
Japanese Patent JP2005074466
Kind Code:
A
Abstract:

To provide a nozzle for laser beam machining which is constituted so as to irradiate the surface of a work with a laser beam and cut off the outer air from a machining point of the work irradiated with the laser beam, and a laser beam machine using the nozzle.

In the laser machining nozzle 18, a laser irradiating opening 73 for passing the laser beam opens at the center of a bottom face, and first gas jetting openings 74, 76 open on the outside of the laser irradiating opening 73. Further, second gas jetting openings 78, 80 open on the outside of the first gas jetting openings 74, 76, and gas suction opening 82, 84 open on the outside of the second gas jetting openings 78, 80. The gas suction openings 82, 84 is communicated with gas suction channels 26a, 26b and suck gases jetted from the first gas jetting openings 74, 76 and the second gas jetting openings 78, 80 disposed on the inside of the same and the outer air mixed into the gap S between the laser machining nozzle 18 and the work 14 due to the movement of the work 14 by means of the suction force of a vacuum pump 30. Accordingly, it becomes possible to shield so as to prevent the outer air to come into the vicinity of the machining point of the work 14 irradiated with the laser beam.


Inventors:
TANAKA KENTA
Application Number:
JP2003307512A
Publication Date:
March 24, 2005
Filing Date:
August 29, 2003
Export Citation:
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Assignee:
SUMITOMO HEAVY INDUSTRIES
International Classes:
B23K26/14; H01L21/268; (IPC1-7): B23K26/06; B23K26/14; H01L21/268
Domestic Patent References:
JP2001321976A2001-11-20
JPH116086A1999-01-12
JP2002075904A2002-03-15
JPH118205A1999-01-12
Attorney, Agent or Firm:
Tadahiko Ito