Title:
NOZZLE FOR LASER BEAM MACHINING
Document Type and Number:
Japanese Patent JP3262894
Kind Code:
B2
Abstract:
PURPOSE: To provide a nozzle for laser beam machining by which a stable working is performed by feeding assist gas to a working part.
CONSTITUTION: A plate 9 formed with a material transmitting a laser beam and arranged on a condenser lens 5 side so that it is positioned inside between the condenser lens 5 and a print substrate 1, and a plate 11 formed with the same material as that of the plate 9, arranged on the print substrate 1 side, and on which a hole 13 with a smaller diameter than a hole diameter to be worked on the print substrate 1, is formed in the center part, are provided at a prescribed interval. A space for supplying assist gas for laser beam machining from a blowing port 14, is formed with these plates 9, 11 and a nozzle 8, and a suction port 15 sucking sublimed gas, is provided on the outer periphery of a tip part on the print substrate 1 side of a nozzle 8.
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Inventors:
Kunio Arai
Shigeru Kosugi
Shigeru Kosugi
Application Number:
JP12566193A
Publication Date:
March 04, 2002
Filing Date:
May 27, 1993
Export Citation:
Assignee:
Hitachi Via Mechanics Co., Ltd.
International Classes:
B23K26/064; B23K26/142; H05K3/00; (IPC1-7): B23K26/06; B23K26/14
Domestic Patent References:
| JP6462294A | ||||
| JP2160194A | ||||
| JP4884095U | ||||
| JP63196388U |