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Title:
NOZZLE AND LIQUID RECOVERY METHOD
Document Type and Number:
Japanese Patent JP2008132401
Kind Code:
A
Abstract:

To provide a nozzlecapable of making both of a sweeping efficiency and a recovering property compatibly with each other, and to provide a liquid recovery method.

When sweeping a sample surface with liquid extruded from the top end of the nozzle and sucking the liquid after sweeping with the nozzle for recovery, a nozzle having an end face 310 with an outer edge 312 protruded in the top end direction and an opening 322 eccentric near to the outer edge at the end face, is used for the nozzle 100. The liquid after sweeping is sucked by relatively moving the nozzle along the sample surface in the direction reverse to eccentric direction of the opening.


Inventors:
KAWABATA KATSUHIKO
ICHINOSE TATSUYA
LEE SUNJE
Application Number:
JP2006318491A
Publication Date:
June 12, 2008
Filing Date:
November 27, 2006
Export Citation:
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Assignee:
IAS INC
International Classes:
B05C11/10; B05B1/02; B05C5/00; B05C11/00; B05D3/00
Domestic Patent References:
JPH02229428A1990-09-12
JPH05283498A1993-10-29
JP2001196432A2001-07-19
JP2000019084A2000-01-21
JP2003344243A2003-12-03
JP2004170222A2004-06-17
JP2005326365A2005-11-24
JP2006013234A2006-01-12
JPH091024A1997-01-07
JPH09148212A1997-06-06
JP2000061378A2000-02-29
JP2007311408A2007-11-29
Foreign References:
US20020134406A12002-09-26
Attorney, Agent or Firm:
Fujiharu Ijima
Nobushige Samejima