Title:
NOZZLE PLATE, PRODUCTION THEREOF AND INK JET RECORDING HEAD
Document Type and Number:
Japanese Patent JP3603939
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a nozzle plate capable of stabilizing ink emitting characteristics, a method for producing the same and an ink jet recording head.
SOLUTION: A nozzle substrate 11 comprising a silicon single crystal substrate and the nozzle forming part 13 which is formed on one surface of the nozzle substrate 11 and to which nozzle orifices 12 being through-holes are formed are provided. The nozzle forming part 13 is integrally formed to the nozzle substrate by electroforming to reduce the warp quantity of the substrate after the bonding of a nozzle plate.
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Inventors:
Katsuto Shimada
Application Number:
JP21455499A
Publication Date:
December 22, 2004
Filing Date:
July 29, 1999
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
B41J2/135; B41J2/045; B41J2/055; (IPC1-7): B41J2/135
Domestic Patent References:
| JP4021452A | ||||
| JP3286870A | ||||
| JP8118655A | ||||
| JP10016237A |
Attorney, Agent or Firm:
Hiroyuki Kurihara