ナノサイズヒータ付きノズルおよびその製造方法ならびに微小薄膜の製造方法

Title:

ナノサイズヒータ付きノズルおよびその製造方法ならびに微小薄膜の製造方法

Document Type and Number:

Japanese Patent JPWO2005038080

Kind Code:

A

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Inventors:

Nakayama 喜 10, 000
Seiji Akita

Application Number:

JP2004015598W

Publication Date:

April 28, 2005

Filing Date:

October 21, 2004

Export Citation:

Assignee:

Osaka Industrial Promotion Organization

International Classes:

B82B3/00; C23C16/455; C01B31/02; B82B1/00; H01L21/205

Attorney, Agent or Firm:

Yamada Takuji
Mitsuo Tanaka
Hisao Ishii
Mikio Takeuchi

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