To make it possible to reduce abrasion of a supporting face caused by rubbing with an object by covering with an amorphous hard carbon film over the supporting face made from ceramics, to fairly reduce dusts attaching and to fairly reduce light reflection during glass substrate exposure.

An object support device has a support face 12 which is made from ceramics and supports an object by sucking or boarding thereon, and the support face 12 is covered with an amorphous hard carbon film 15. For example, a support body 10 has an unit body of a disk made from alumina ceramics with 99.9% of purity, ring-shaped pins 16 are projected as concentric circles on a face of the disk and the face of ring-shaped pins 16 forms a support face 12. Many suction holes 13 are made through the surface of the base body 11 of the side of the support face 12 and inducing holes 14 connected with the suction holes 13 are made through the side wall of the base body 11. Additionally the amorphous hard carbon film 15 0.2-10μm thick covers over the surface of the base body 11 including the support face 12.