Title:
走査透過型電子顕微鏡の観察方法及び走査透過型電子顕微鏡
Document Type and Number:
Japanese Patent JP5817360
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an observation method of an electron microscope capable of obtaining a highly accurate STEM image.SOLUTION: The observation method of an electron microscope in which a specimen is irradiated with an electron beam, and the electron beam transmitted through the specimen or being scattered by the specimen is detected by means of a detector includes a step for acquiring the image of the specimen by means of the detector, a step for selecting an image closest to the image thus acquired among a plurality of images observed in a state where the position of the detector is shifted, and calculating the direction and amount of positional shift of the detector on the basis of the position information of the image thus selected, and a step for moving the detector on the basis of the direction and amount of positional shift of the detector thus calculated.
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Inventors:
Small High Kan Minoru
Application Number:
JP2011195446A
Publication Date:
November 18, 2015
Filing Date:
September 07, 2011
Export Citation:
Assignee:
富士通株式会社
International Classes:
H01J37/244; H01J37/22; H01J37/28
Domestic Patent References:
| JP2006196236A | ||||
| JP9097584A | ||||
| JP2003249186A |
Attorney, Agent or Firm:
Tadahiko Ito
Akinori Yamaguchi
Akinori Yamaguchi