To secure the longtime stabilized operation of a film forming device by lowering the solidification of the sublimate raw material gas in a switching device and a flow rate adjusting device so as to reduce the number of exchange of the opening and closing device or the like.
This opening and closing device with a flow rate adjusting function is basically formed of a valve body 2, a diaphragm 3 brought in contact with the valve body 2 and for opening and closing a flow passage, a piston 4 having a stem 8 for pushing the diaphragm 3, a driving part for driving the piston 4, a stopper 5 for deciding the upper-end of the piston, and a cover 6 for holding the stopper 5. The stopper can be adjusted so as to change a stroke of the piston and so as to adjust the flow rate of the raw material gas passing through the switching device.
TANAKA YASUYUKI
KATAYAMA MASAYUKI
ISHIHARA ATSUSHI
