Title:
OPERATION CONFIRMING DEVICE OF GAS FLOW MIXING RATIO
Document Type and Number:
Japanese Patent JPS61133415
Kind Code:
A
Abstract:
PURPOSE:To mix gases and check the mixture with the use of mass flow controllers having a different full scale by providing a full scale flow ratio setting means of gas flow controllers, two sets of gas flow controllers, a mixing rate calculating means of flow of the gas flow controllers, a mixture ratio limit value setting means and a comparison means. CONSTITUTION:Flow outputs 6a, 6b are inputted to the flow rate calculation circuit 8 of an operation confirming device 1, the flow rate of the full scale of the two sets of mass flow controllers 2a, 2b is set by the full scale flow rate setting circuit 9, the result is inputted to the flow rate calculation circuit 8, the flow output is calibrated by the full scale flow to calculate the actual flow rate. The actual flow rate is compared with the upper limit decided by an upper limit setting circuit 10 by the comparison circuit 11, and when the rate exceeds the upper limit, an output 12 goes to logical '1' and an error signal is displayed. Similarly, alower limit setting circuit 13 and a comparison circuit 14 are used, and an output 15 displays the error signal for the lower limit.
Inventors:
KANDA KAORU
Application Number:
JP25471584A
Publication Date:
June 20, 1986
Filing Date:
December 02, 1984
Export Citation:
Assignee:
SIGMA GIJUTSU KOGYO
International Classes:
G05B23/02; G05D11/13; (IPC1-7): G05B23/02