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Title:
OPERATION HISTORY INFORMATION REGISTRATION DEVICE/ METHOD, MEDIUM RECORDING OPERATION HISTORY INFORMATION REGISTRATION CONTROL PROGRAM AND SEMICONDUCTOR EXPOSURE DEVICE
Document Type and Number:
Japanese Patent JPH10111711
Kind Code:
A
Abstract:

To speedily investigate the cause of a reported fault and to realize clear measures against it by considerably suppressing the deterioration of performance by means of the operation of a logging means and enlarging the acquirement object of fault information as much as possible especially in the tracking of the fault whose generation frequency is low.

A data acquirement means 102 acquires condition data and a condition judgement means 103 judges whether acquired condition data satisfies the specified starting condition where a probability that the fault occurs is high. The logging means 104 is operated only when the condition is satisfied and operation history information is registered in a product. In a regular processing which does not satisfy the condition, operation history information is not registered in the product and it is shipped.


Inventors:
KAWAMURA NORIO
Application Number:
JP26408396A
Publication Date:
April 28, 1998
Filing Date:
October 04, 1996
Export Citation:
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Assignee:
CANON KK
International Classes:
G03F7/20; G05B23/02; H01L21/02; H01L21/027; (IPC1-7): G05B23/02; G03F7/20; H01L21/02; H01L21/027
Attorney, Agent or Firm:
Yoshikazu Tani (1 person outside)