Title:
OPERATION UNIT
Document Type and Number:
Japanese Patent JPH1148059
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To enable the direct confirmation of working area by an operator by connecting an operating main body connector to a device connector, which is arranged at a required position of a working device, freely to be disconnected. SOLUTION: At the time of setting up a cutting grinding wheel 38, an operation panel 11 is operated on the basis of a command displayed in a monitor 12 so as to gradually lower the cutting grinding wheel 38. At this stage, the operating main body connector 15 is connected to a device connector 23 provided near a polishing grinding wheel 38 and a chuck table 37. With this structure, an operator can directly confirm a contact of the cutting grinding wheel 38 with the chuck table 37 near there. Assistant is thereby unnecessary.
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Inventors:
SHINOYAMA HIROSHI
Application Number:
JP20589497A
Publication Date:
February 23, 1999
Filing Date:
July 31, 1997
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B23Q1/00; H01L21/304; (IPC1-7): B23Q1/00; H01L21/304
Attorney, Agent or Firm:
Isao Sasaki (1 person outside)
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